Gas manifold manual#

Safe and Dependable Gas Distribution: Safety is the most important thing when you’re working with dangerous gases.

VMBs provide numerous benefits for the user, including:

They are affordable and useful for eliminating multiple boxes to each tool centralizing the gasses and saving valuable fab space. Gas valve manifold boxes are a secure and extremely affordable way of connecting single source gas to multiple distribution points or multiple compatible gases to single process tools. 4-stick vmbs and 8-stick vmbs configurations are available, as well as single gas sticks and gas stick assemblies that allow for gas distribution through multiple outputs from a single-source supply without the need for a gas valve box enclosure when warranted.Īdvantages of Pneumatic Valve Manifold Boxes

Gas manifold manual#

SilPac offers standard manual gas boxes, as well as semi-automatic gas boxes with pneumatic ESO valves and life safety controllers. They are usually paired with a pressure regulator that reduces the pressure within the gas valve manifold to an appropriate operating range along with gauges, transducers, and mass flow meters / controllers to monitor. Specialty gas manifolds are useful in many applications and industries including semiconductor, medical, and pharmaceutical applications. These boxes are designed to be as simple as gas isolation box or vent and purge stick assemblies with devices to monitor life safety events, such as high pressure, excess flow to trigger emergency shutoff valves all monitor with PLC based controllers. Valve manifold boxes serve as distribution box or may allow multiple compatible gases to enter and exit with the ability to vent and purge while other processes are still running.

Gas valve manifold boxes (VMBs) are designed to take a single source gas and distribute to multiple tools and be able to service components within the VMB with vent and purge features to safely change out or remove the gas stick without takings all you tools down.

WIKA® Pressure Transducers/Transmitters.

Single Stage Springless Pressure Regulators.